Spectroscopic Analysis of Electrical Parameters in Helium Plasma with Microwave Discharge
Abstract
This study presents a comprehensive spectroscopic analysis of the electrical parameters of a microwave discharge in helium plasma. The primary aim is to investigate and characterize the plasma's electrical properties, including electron density, electron temperature, and ionization processes, using advanced spectroscopic techniques. Helium plasma, generated through microwave discharge, offers a well-controlled environment for examining these parameters due to its simplicity and stability compared to other plasma types.
Experimental Setup and Methodology
The experiment utilizes a microwave discharge system to generate a helium plasma under controlled conditions. The microwave power, frequency, and pressure of the helium gas are carefully regulated to ensure a stable discharge. Spectroscopic techniques, including optical emission spectroscopy (OES) and absorption spectroscopy, are employed to probe the plasma and collect data on its emission spectra. The spectra are analyzed to extract information on the electronic transitions and energy levels of helium atoms and ions.
Results and Discussion
Electron Density and Temperature: The spectroscopic data reveal detailed information about the electron density and temperature within the helium plasma. By analyzing the intensity ratios of spectral lines and the width of emission lines, the electron density is estimated to be in the range of 1018−1019 cm−3, while the electron temperature is determined to be approximately 1-2 eV. These values are consistent with theoretical predictions for microwave discharges in helium.
Ionization Processes: The analysis also provides insights into the ionization processes occurring in the plasma. The relative intensities of different spectral lines indicate the predominance of certain ionization states, shedding light on the mechanisms of ionization and recombination. The study identifies the dominant ionization pathways and assesses their contribution to the overall plasma behavior.
Plasma Stability and Uniformity: The results demonstrate that the microwave discharge produces a stable and uniform plasma, with consistent electrical parameters across the discharge volume. This stability is crucial for applications requiring precise control of plasma properties, such as in materials processing and surface treatment.
Keywords
Spectroscopic, Electrical Parameters, Helium Plasma, Microwave Discharge, Plasma Diagnostics,, Spectroscopy, Electrical CharacterizationHow to Cite
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